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High vacuums are tricky. The first high vacuums were achieved with mercury-based Sprengel pumps, but mercury isn't available everywhere. Maybe you could make a small, slow turbomolecular pump work if it was mandatory (it's all about the bearing) but it seems anything that needs sealing is going to struggle without either that or a massive petrochemical industry to supply the needed high-quality synthetic oils. If you're doing technology all over again, I'd skip the vacuum tubes stage because of this.
If you can get away with a low vacuum, a piston-type pump with castor oil as the sealant will do. It seems like a low vacuum would work for at least some kinds of VD. Maybe you can help clear it up a bit.
1 micron features is as ambitious as I've bothered to think about. For basic computing, like to run a CNC machine, that should do.